SEMICONDUCTOR PLASMA PROCESS EQUIPMENT
Advanced Dry Asher Platforms for Semiconductor Manufacturing
Acmewin develops Aibo Dry Asher platforms, equipment upgrades, parts support and process solutions for semiconductor manufacturing.
The Aibo Dry Asher Series combines plasma process capability, vacuum integration, wafer handling and configurable control architecture for strip, de-scum, lite etch and plasma-cleaning applications.
ENGINEERING SOLUTIONS
Engineering Solutions for Semiconductor Equipment
Acmewin International Corp. provides semiconductor equipment development, refurbishment, upgrade, parts supply and technical support services.
Our engineering capabilities cover plasma process systems, RF power delivery, vacuum control, wafer transfer, equipment automation and lifecycle support.
By combining equipment engineering, field service experience and in-house development, Acmewin supports customers seeking practical solutions for both legacy equipment and new platform requirements.
AIBO PRODUCT LINE
Aibo Dry Asher Platforms
Three Aibo platform directions support different wafer sizes, upgrade strategies and production requirements. Platform selection depends on process application, chamber configuration and fab integration needs.
Aibo I Dry Asher
Compact dry asher platform and legacy equipment upgrade solution.
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Aibo II Dry Asher
Multi-application 4-inch to 8-inch dry asher platform with single, dual and triple chamber configurations.
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Aibo III Dry Asher
12-inch conceptual dry asher platform with triple process module architecture.
Conceptual Design / 3D Layout Rendering
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Integrated Equipment Engineering
Semiconductor plasma equipment requires coordinated RF, vacuum, motion, software and process subsystems. Acmewin supports these areas through engineering development and lifecycle service experience.
ICP Plasma Technology
Configurable plasma process capability for strip, de-scum, lite etch and plasma cleaning applications.
RF Power Delivery
RF generator, matching network and distribution integration for plasma equipment applications.
Vacuum and Pressure Control
Pressure controller, throttle valve, vacuum valve and chamber pressure integration support.
Equipment Automation and Integration
Recipe management, HMI, motion control, equipment monitoring and fab interface integration.
APPLICATIONS
Dry Asher Process Applications
Aibo applications are reviewed according to wafer structure, material stack, process sequence and required result. Actual performance depends on recipe configuration and system conditions.
Photoresist Strip
Plasma strip support for selected post-lithography, post-implant and post-etch process stages.
De-scum
Thin photoresist residue removal for pattern preparation and downstream process readiness.
Lite Etch
Controlled plasma exposure for light surface treatment and process development requirements.
Plasma Clean
Organic contamination and process residue treatment for selected wafer and chamber conditions.
ACMEWIN INNOVATION
In-house Engineering Development
Acmewin develops equipment components, control solutions and platform technologies to address practical semiconductor equipment lifecycle and integration challenges.
RF Power Distribution
RF distribution and imbalance monitoring solutions for plasma equipment applications.
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Pressure Control
Pressure-control replacement and integration support for semiconductor vacuum systems.
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RF Matching
RF matching network solutions for plasma process equipment and RF power delivery.
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Wafer Cooling Transfer Platform
Public-safe patent and innovation summary for wafer handling and cooling integration.
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ISO 9001:2015 Quality Management System
Acmewin maintains an ISO 9001:2015 quality management system covering semiconductor equipment installation, used-equipment refurbishment, parts sales, equipment assembly and manufacturing.
- Certificate No. IAS-QMS-24-029
- Valid 2025-10-21 to 2027-10-20
- Equipment Installation
- Used Equipment Refurbishment
- Parts Sales
- Equipment Assembly and Manufacturing
ASPEN2 SERVICES
Used Equipment, Parts and Lifecycle Support
Aspen2 provides a service-oriented path for used equipment, replacement parts, repair, upgrade and preventive-maintenance inquiries.
Used Equipment
Refurbished equipment and module availability for selected Aspen II configurations.
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Replacement parts, refurbished assemblies and compatibility evaluation for semiconductor equipment support.
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Repair Service
Inspection, diagnosis and refurbishment support for selected assemblies and components.
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PM Kits
Preventive-maintenance kit review according to module, chamber and equipment revision.
View PM KitsDiscuss Your Equipment or Process Requirement
Provide your equipment model, process application, part number, current issue or upgrade objective. Acmewin will assist with technical review and solution evaluation.