Acmewin 推出具不平衡偵測功能之 RF 功率分配器，提升電漿設備效能與安全性
專注於半導體製程裝備的 Acmewin International Corp. 今日宣布推出全新研發的 RF Splitter with Imbalance Detector（含不平衡偵測功能的 RF 功率分配器），為電漿製程設備提供高度可靠的射頻功率分配與即時異常監測方案。此產品已獲得台灣和中國大陸等地新型專利保障。
此款 RF Splitter 能將高頻功率精準分配至多個腔室或負載，同時內建的不平衡偵測模組可即時監控各輸出端的功率差異，於製程運行時發現異常並即時預警，有效降低設備損壞及加工不良的風險，提升整體產線穩定度及安全性。產品採用緊湊的金屬機殼，配置標準的 RF 輸入與輸出連接器，方便整合進現有機台；此外，外接監控介面可與主機程式對接，以視覺化方式呈現功率平衡狀況，協助操作人員快速判斷並維護製程品質。
Acmewin International Corp. 創辦人Ken Wu表示：「我們長期專注於乾式去光阻及ICP電漿應用平台研發，為了提高設備的可靠度與可監控性，特別開發了這款具不平衡偵測功能的 RF 分配器。它不僅能提升產線效能，也能有效降低因功率不平衡造成的設備風險並達到節能省電的目的，是半導體及相關製程業者提升產能與品質的重要工具。」
此新品已納入 Acmewin「全新設備」產品線，並可依客戶需求提供客製化規格。相關技術資料與應用諮詢，可透過 Acmewin 官方網站聯繫取得。
Acmewin Unveils RF Power Splitter with Imbalance Detection to Enhance Plasma Equipment Performance and Safety
Acmewin International Corp., focused on semiconductor process equipment, today announced the launch of its newly developed RF Splitter with Imbalance Detector, providing highly reliable RF power distribution and real-time anomaly monitoring for plasma processing systems. The product has been granted utility model patent protection in Taiwan and Mainland China.
This RF Splitter precisely distributes high‑frequency power to multiple chambers or loads, while its built‑in imbalance detection module continuously monitors the power difference at each output. When an anomaly is detected during operation, the module issues an immediate warning, reducing the risk of equipment damage and process defects and improving overall line stability and safety. The unit features a compact metal enclosure and standard RF input and output connectors for easy integration with existing equipment. It also offers an external monitoring interface that can be connected to the host control software, presenting the power balance status visually and helping operators quickly assess and maintain process quality.
Ken Wu, founder of Acmewin International Corp., remarked, “We have long focused on dry-strip and ICP plasma application platforms. To enhance equipment reliability and monitorability, we specifically developed this RF splitter with imbalance detection. It not only improves production efficiency but also effectively reduces equipment risks caused by power imbalances and contributes to energy savings. It is an important tool for semiconductor and related process industries seeking to boost capacity and product quality.”
The new device has been added to Acmewin’s “New Equipment” product line. Custom specifications are available upon request. For detailed technical information and application support, please contact Acmewin through the company’s official website.