AIBO I DRY ASHER
Compact dry asher platform and modernization solution for selected legacy semiconductor equipment applications.
Product Overview
Aibo I Dry Asher is designed for selected semiconductor photoresist strip, plasma cleaning and legacy equipment modernization applications. The platform supports control, RF, vacuum and software upgrade review according to the installed equipment configuration.
- Compact system architecture
- Selected 4-inch to 8-inch application review
- RF and plasma upgrade options
- Windows-based HMI modernization
- Equipment lifecycle support
Platform Capabilities
Plasma Processing
Supports strip and selected plasma-cleaning applications according to process and chamber configuration.
RF Power Upgrade
RF generator and matching-network upgrade options are reviewed according to the installed system and process requirement.
Vacuum and Pressure Control
Vacuum valve, pressure-control and chamber integration options are evaluated according to the existing equipment condition.
Equipment Modernization
Control system, HMI, data monitoring and obsolete-part replacement can be reviewed as part of an equipment lifecycle upgrade.
Windows-Based Control System Upgrade
Aibo I modernization can support migration from legacy operator workflows to a Windows-based control interface. Public website information is limited to operator-level capabilities and does not disclose internal control architecture.
HMI Operation Panel
Control Interface
Operator interface for equipment status review and operation workflow.
Main Control Screen
GUI
Main interface for operation visibility and equipment monitoring.
Recipe Editor
GUI
Recipe management interface for controlled process setup.
Data History
GUI
Trend and history screen for process and equipment review.
Detailed connection commands, interface parameters, file locations, access credentials, process recipes and non-public control details are not published on this website.
Applications
Aibo I application suitability is reviewed according to wafer size, chamber configuration, RF system, process requirement and equipment condition.
- Photoresist Strip
- De-scum
- Plasma Clean
- Selected legacy process applications
Equipment Gallery
Gallery images show Aibo I equipment and control-interface context. Images are shown for public product understanding and do not disclose internal installation procedures.
Installed System
Equipment
Aibo I installed system side view.
Front Partial View
Equipment
Aibo I front-side equipment view.
Front Open View
Equipment
Aibo I front open view for equipment context.
HMI Detail
Control Interface
Aibo I HMI and loadlock detail view.
Recipe Editor
Control Interface
Aibo I recipe editor screen.
Data History
Control Interface
Aibo I data history chart screen.
Upgrade Benefits
Improved Operator Interface
Modernized HMI screens can improve operation visibility and reduce dependence on outdated workflows.
Recipe Management
Recipe review and management functions can be evaluated according to the installed process requirements.
Process Data Visibility
Data history and trend screens support equipment review and maintenance planning.
Alarm and History Review
Alarm and event history can support troubleshooting and operational review.
Obsolete Component Replacement
Selected obsolete control and interface components can be reviewed for replacement or modernization.
Long-Term Equipment Support
Lifecycle support can help customers evaluate practical upgrade and maintenance paths.
Closed-loop Z-axis feedback options are evaluated according to the installed robot configuration and upgrade requirements. Public materials do not specify sensor type, feedback hardware, thresholds, driver parameters or non-public setup details.
Related Products / Solutions
Evaluate Your Aibo I Upgrade or Replacement Requirement
Provide the existing equipment model, wafer size, process application, current control system and upgrade objective for engineering review.