Aspen2

Aspen2 Parts

ASPEN2 REPLACEMENT PARTS

Replacement parts and major assemblies are available for selected Aspen II equipment configurations, revisions and modules. Part number and compatibility review are required before ordering.

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Aspen II replacement parts reference image
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Parts Overview

Parts are organized by function so maintenance and engineering teams can request identification, compatibility review and availability confirmation. Items without a confirmed part number are marked as contact for identification.

Category Filter

RF / ICP ComponentsPCB / Control BoardsChamber PartsRobot / Wafer HandlingMotion / CylinderVacuum ComponentsValvesPower SupplyGas / MFC ComponentsO-ring / Seal KitsMajor AssembliesOther Equipment Parts

Parts Catalog Grid

RF Matching Box part image
Actual Part Image

RF Matching Box

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Aspen II Robot Assembly part image
Actual Part Image

Aspen II Robot Assembly

Part Number: Contact for identificationCategory: PartsSubcategory: Major AssembliesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Aspen II Robot Arm part image
Actual Part Image

Aspen II Robot Arm

Part Number: Contact for identificationCategory: PartsSubcategory: Robot / Wafer HandlingImage Status: Correct Actual Part ImageAvailability: Contact for availability
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LPT 2200 SMIF Arm part image
Actual Part Image

LPT 2200 SMIF Arm

Part Number: Contact for identificationCategory: PartsSubcategory: Robot / Wafer HandlingImage Status: Correct Actual Part ImageAvailability: Contact for availability
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I/O Controller part image
Actual Part Image

I/O Controller

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Image Requires Owner Review

Trazar RF Matching box

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Image Requires Owner ReviewAvailability: Contact for availability
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Image Requires Owner Review

Trazar AMU 10D-2

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Image Requires Owner ReviewAvailability: Contact for availability
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Aspen II Parts part image
Actual Part Image

Aspen II Parts

Part Number: Contact for identificationCategory: PartsSubcategory: Other Equipment PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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O-ring and Seal Components part image
Actual Part Image

O-ring and Seal Components

Part Number: Contact for identificationCategory: PartsSubcategory: O-ring / Seal KitsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Image Requires Owner Review

RF10S-208V 1P 1KW 13.56MHZ CE N SE 218

Part Number: RF10S-208VCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Image Requires Owner ReviewAvailability: Contact for availability
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Analog Output PCB - ISA Bus part image
Actual Part Image

Analog Output PCB – ISA Bus

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PCB Assembly,PC AT,ANALOG OUT part image
Actual Part Image

PCB Assembly,PC AT,ANALOG OUT

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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AdapTorr Valve Adaptive Pressure Controller part image
Actual Part Image

AdapTorr Valve Adaptive Pressure Controller

Part Number: Contact for identificationCategory: PartsSubcategory: ValvesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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ACX1201 AdapTorr Valve Adaptive Pressure Controlle part image
Actual Part Image

ACX1201 AdapTorr Valve Adaptive Pressure Controlle

Part Number: ACX1201Category: PartsSubcategory: ValvesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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L-SHAPE, NOTCH E-MAX part image
Actual Part Image

L-SHAPE, NOTCH E-MAX

Part Number: Contact for identificationCategory: PartsSubcategory: Other Equipment PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Image Requires Owner Review

CHRISTO-LUBE MCG 109

Part Number: Contact for identificationCategory: PartsSubcategory: Other Equipment PartsImage Status: Image Requires Owner ReviewAvailability: Contact for availability
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Image Requires Owner Review

CHRISTO-LUBE MCG 200

Part Number: Contact for identificationCategory: PartsSubcategory: Other Equipment PartsImage Status: Image Requires Owner ReviewAvailability: Contact for availability
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Image Requires Owner Review

Fomblin RT-15 Grease , 100g

Part Number: Contact for identificationCategory: PartsSubcategory: Vacuum ComponentsImage Status: Image Requires Owner ReviewAvailability: Contact for availability
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Image Requires Owner Review

Isoflex NCA 15, 50g

Part Number: Contact for identificationCategory: PartsSubcategory: Other Equipment PartsImage Status: Image Requires Owner ReviewAvailability: Contact for availability
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STRAP HEATER part image
Actual Part Image

STRAP HEATER

Part Number: Contact for identificationCategory: PartsSubcategory: Chamber PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Pusher Heater part image
Actual Part Image

Pusher Heater

Part Number: Contact for identificationCategory: PartsSubcategory: Chamber PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Lift Cylinder part image
Actual Part Image

Lift Cylinder

Part Number: Contact for identificationCategory: PartsSubcategory: Motion / CylinderImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Stepper Motor Drive ( 750) part image
Actual Part Image

Stepper Motor Drive ( 750)

Part Number: Contact for identificationCategory: PartsSubcategory: Motion / CylinderImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Watlow Temperature Controller part image
Actual Part Image

Watlow Temperature Controller

Part Number: Contact for identificationCategory: PartsSubcategory: Other Equipment PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Slit Door Assembly (NEW design) part image
Actual Part Image

Slit Door Assembly (NEW design)

Part Number: Contact for identificationCategory: PartsSubcategory: Major AssembliesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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MANOMETER,0-20 TORR, Brooks part image
Actual Part Image

MANOMETER,0-20 TORR, Brooks

Part Number: Contact for identificationCategory: PartsSubcategory: Vacuum ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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RF Splitter with Imbalance Detector part image
Actual Part Image

RF Splitter with Imbalance Detector

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Throttle Valve part image
Actual Part Image

Throttle Valve

Part Number: Contact for identificationCategory: PartsSubcategory: ValvesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Iso Valve part image
Actual Part Image

Iso Valve

Part Number: Contact for identificationCategory: PartsSubcategory: ValvesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Heater Jacket,Heating package, For ISO VALVE part image
Actual Part Image

Heater Jacket,Heating package, For ISO VALVE

Part Number: Contact for identificationCategory: PartsSubcategory: ValvesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Heater Jacket,Heating package, For THROTTLE VALVE part image
Actual Part Image

Heater Jacket,Heating package, For THROTTLE VALVE

Part Number: Contact for identificationCategory: PartsSubcategory: ValvesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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CONT,THROTTLE VALVE,AC-2 part image
Actual Part Image

CONT,THROTTLE VALVE,AC-2

Part Number: Contact for identificationCategory: PartsSubcategory: ValvesImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PCB Assembly, PC AT, ANALOG IN part image
Actual Part Image

PCB Assembly, PC AT, ANALOG IN

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PCB Assembly,SHUTTLE #1 part image
Actual Part Image

PCB Assembly,SHUTTLE #1

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Analog Filter Board part image
Actual Part Image

Analog Filter Board

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PCB Assembly,TERMINAL PNL,MODEL B part image
Actual Part Image

PCB Assembly,TERMINAL PNL,MODEL B

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Motor Control Board part image
Actual Part Image

Motor Control Board

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Wafer sensor board part image
Actual Part Image

Wafer sensor board

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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FILTER,RFI/EMI,20A,120VAC,MOD part image
Actual Part Image

FILTER,RFI/EMI,20A,120VAC,MOD

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PCB Assembly,SECONDARY ROBOT INTRFC part image
Actual Part Image

PCB Assembly,SECONDARY ROBOT INTRFC

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PCB Assembly,OPERATOR INTERFACE part image
Actual Part Image

PCB Assembly,OPERATOR INTERFACE

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PCB Assembly,PRIMARY INTERFACE part image
Actual Part Image

PCB Assembly,PRIMARY INTERFACE

Part Number: Contact for identificationCategory: PartsSubcategory: PCB / Control BoardsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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STRAP RF INDEPENDENT HEAD CONTROL part image
Actual Part Image

STRAP RF INDEPENDENT HEAD CONTROL

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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CAGE ASY,ICP,W/MATCH NETWORKS part image
Actual Part Image

CAGE ASY,ICP,W/MATCH NETWORKS

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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AMU10D-2, RF Matching part image
Actual Part Image

AMU10D-2, RF Matching

Part Number: AMU10D-2Category: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Vacuum Capacitor,125pf/8kv part image
Actual Part Image

Vacuum Capacitor,125pf/8kv

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Vacuum Capacitor 100PF part image
Actual Part Image

Vacuum Capacitor 100PF

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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CYL GUIDED 1 1/8, HTV SEALS part image
Actual Part Image

CYL GUIDED 1 1/8, HTV SEALS

Part Number: Contact for identificationCategory: PartsSubcategory: O-ring / Seal KitsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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LIFT DOOR,SEAL HOUSING part image
Actual Part Image

LIFT DOOR,SEAL HOUSING

Part Number: Contact for identificationCategory: PartsSubcategory: O-ring / Seal KitsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Motor, Shuttle Rotate Modify part image
Actual Part Image

Motor, Shuttle Rotate Modify

Part Number: Contact for identificationCategory: PartsSubcategory: Robot / Wafer HandlingImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Gearmotor (Shuttle Lift Motor) part image
Actual Part Image

Gearmotor (Shuttle Lift Motor)

Part Number: Contact for identificationCategory: PartsSubcategory: Robot / Wafer HandlingImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Motor,Robot. Ext & Rotate part image
Actual Part Image

Motor,Robot. Ext & Rotate

Part Number: Contact for identificationCategory: PartsSubcategory: Robot / Wafer HandlingImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Heater Block part image
Actual Part Image

Heater Block

Part Number: Contact for identificationCategory: PartsSubcategory: Chamber PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Power Feedthrough part image
Actual Part Image

Power Feedthrough

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PLATE COIL SUPPORT part image
Actual Part Image

PLATE COIL SUPPORT

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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SLIT DOOR part image
Actual Part Image

SLIT DOOR

Part Number: Contact for identificationCategory: PartsSubcategory: Chamber PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Paddle part image
Actual Part Image

Paddle

Part Number: Contact for identificationCategory: PartsSubcategory: Chamber PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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PWR SPLY,24VDC,7.2A,SGL part image
Actual Part Image

PWR SPLY,24VDC,7.2A,SGL

Part Number: Contact for identificationCategory: PartsSubcategory: Power SupplyImage Status: Correct Actual Part ImageAvailability: Contact for availability
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COIL ASSY SILVER PLATED part image
Actual Part Image

COIL ASSY SILVER PLATED

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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GRID,LOWER part image
Actual Part Image

GRID,LOWER

Part Number: Contact for identificationCategory: PartsSubcategory: Chamber PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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GRID,UPPER part image
Actual Part Image

GRID,UPPER

Part Number: Contact for identificationCategory: PartsSubcategory: Chamber PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Quartz Tube part image
Actual Part Image

Quartz Tube

Part Number: Contact for identificationCategory: PartsSubcategory: Chamber PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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BRACKET COIL part image
Actual Part Image

BRACKET COIL

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Shield Faraday part image
Actual Part Image

Shield Faraday

Part Number: Contact for identificationCategory: PartsSubcategory: RF / ICP ComponentsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Slit Door Cylinder part image
Actual Part Image

Slit Door Cylinder

Part Number: Contact for identificationCategory: PartsSubcategory: Motion / CylinderImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Cassette Cylinder part image
Actual Part Image

Cassette Cylinder

Part Number: Contact for identificationCategory: PartsSubcategory: Motion / CylinderImage Status: Correct Actual Part ImageAvailability: Contact for availability
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SMIF cassette door cylinder 18
Actual Part Image

SMIF cassette door cylinder 18″

Part Number: Contact for identificationCategory: PartsSubcategory: Robot / Wafer HandlingImage Status: Correct Actual Part ImageAvailability: Contact for availability
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+/- 24 V DC Power Supply part image
Actual Part Image

+/- 24 V DC Power Supply

Part Number: Contact for identificationCategory: PartsSubcategory: Power SupplyImage Status: Correct Actual Part ImageAvailability: Contact for availability
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+/- 15V DC POWER SUPPLY part image
Actual Part Image

+/- 15V DC POWER SUPPLY

Part Number: Contact for identificationCategory: PartsSubcategory: Power SupplyImage Status: Correct Actual Part ImageAvailability: Contact for availability
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MERLIN GERIN 27001 MULTI 9 Barrier Grey part image
Actual Part Image

MERLIN GERIN 27001 MULTI 9 Barrier Grey

Part Number: 27001Category: PartsSubcategory: Other Equipment PartsImage Status: Correct Actual Part ImageAvailability: Contact for availability
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Compatibility Notice

Compatibility depends on equipment configuration, revision and installed module. Contact Acmewin for technical confirmation before ordering.

Part Identification Guide

Please Provide

Equipment model, part number, module, revision, required quantity and clear photos of the installed component.

Review Scope

Acmewin reviews identification, compatibility, availability, replacement sourcing and refurbishment options.

Discuss Your Aspen2 Parts Requirement

Provide part name, part number, equipment model and current issue for availability and compatibility review.

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